OPENAIRE OpenAire Sygma UnpayWall Crossref Microsoft Academic Graph Europe PubMed Central PubMed Central European Union Open Data Portal https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.202102232 https://doi.org/10.1002/adma.202102232 Advanced Materials Open Access 2021-09-08 Abstract<p>Metasurfaces have emerged as a breakthrough platform for manipulating light at the nanoscale and enabling on￢ﾀﾐdemand optical functionalities for next￢ﾀﾐgeneration biosensing, imaging, and light￢ﾀﾐgenerating photonic devices. However, translating this technology to practical applications requires low￢ﾀﾐcost and high￢ﾀﾐthroughput fabrication methods. Due to the limited choice of materials with suitable optical properties, it is particularly challenging to produce metasurfaces for the technologically relevant mid￢ﾀﾐinfrared spectral range. These constraints are overcome by realizing functional metasurfaces on almost completely transparent free￢ﾀﾐstanding metal￢ﾀﾐoxide membranes. A versatile nanofabrication process is developed and implemented for highly efficient dielectric and plasmonic mid￢ﾀﾐinfrared metasurfaces with wafer￢ﾀﾐscale and complementary metal￢ﾀﾓoxide￢ﾀﾓsemiconductor (CMOS)￢ﾀﾐcompatible manufacturing techniques. The advantages of this method are revealed by demonstrating highly uniform and functional metasurfaces, including high￢ﾀﾐQ structures enabling fine spectral selectivity, large￢ﾀﾐarea metalensesￂﾠwithￂﾠdiffraction￢ﾀﾐlimited focusing capabilities, and birefringent metasurfaces providing polarization control at record￢ﾀﾐhigh conversion efficiencies.ￂﾠ Aluminum plasmonic devices and their integration into microfluidics for real￢ﾀﾐtime and label￢ﾀﾐfree mid￢ﾀﾐinfrared biosensing of proteins and lipid vesicles are further demonstrated. The versatility of this approach and its compatibility with mass￢ﾀﾐproduction processes bring infrared metasurfaces markedly closer to commercial applications, such as thermal imaging, spectroscopy, and biosensing.</p Optics and Photonics Semiconductors Infrared Rays Surface Properties Biosensing Techniques 02 engineering and technology 0210 nano-technology 7. Clean energy Research Articles Aluminum Nanostructures Leitis, Aleksandrs, Tseng, Ming Lun, John‐Herpin, Aurelian, Kivshar, Yuri S., Altug, Hatice, 2021-09-07 journalpaper Abstract<p>Metasurfaces have emerged as a breakthrough platform for manipulating light at the nanoscale and enabling on￢ﾀﾐdemand optical functionalities for next￢ﾀﾐgeneration biosensing, imaging, and light￢ﾀﾐgenerating photonic devices. However, translating this technology to practical applications requires low￢ﾀﾐcost and high￢ﾀﾐthroughput fabrication methods. Due to the limited choice of materials with suitable optical properties, it is particularly challenging to produce metasurfaces for the technologically relevant mid￢ﾀﾐinfrared spectral range. These constraints are overcome by realizing functional metasurfaces on almost completely transparent free￢ﾀﾐstanding metal￢ﾀﾐoxide membranes. A versatile nanofabrication process is developed and implemented for highly efficient dielectric and plasmonic mid￢ﾀﾐinfrared metasurfaces with wafer￢ﾀﾐscale and complementary metal￢ﾀﾓoxide￢ﾀﾓsemiconductor (CMOS)￢ﾀﾐcompatible manufacturing techniques. The advantages of this method are revealed by demonstrating highly uniform and functional metasurfaces, including high￢ﾀﾐQ structures enabling fine spectral selectivity, large￢ﾀﾐarea metalensesￂﾠwithￂﾠdiffraction￢ﾀﾐlimited focusing capabilities, and birefringent metasurfaces providing polarization control at record￢ﾀﾐhigh conversion efficiencies.ￂﾠ Aluminum plasmonic devices and their integration into microfluidics for real￢ﾀﾐtime and label￢ﾀﾐfree mid￢ﾀﾐinfrared biosensing of proteins and lipid vesicles are further demonstrated. The versatility of this approach and its compatibility with mass￢ﾀﾐproduction processes bring infrared metasurfaces markedly closer to commercial applications, such as thermal imaging, spectroscopy, and biosensing.</p Wafer‐Scale Functional Metasurfaces for Mid‐Infrared Photonics and Biosensing 10.1002/adma.202102232 777714